

Productions
1. 2016: UFSD1 First 300 thick LGAD (FBK 6” wafer )
2. 2017: UFSD2 First 50 thick LGAD (FBK 6” wafer )
Gain layer doping: Boron, Gallium, Boron + Carbon,
3. Fall 2018: UFSD3 50 LGAD (FBK 6” wafer), produced with the stepper
(many Carbon levels, studies of interpad design)
4. June 2019: UFSD3.1 50 LGAD (internal FBK) interpad design.
5. June 2019 RSD1 Resistive AC-LGAD (FBK 6” wafer
6. June 2020: UFSD3.2 25, 35, 45, and 55 LGAD, carbon studies,
deep, shallow gain implant (FBK 6” wafer
7. Q1/2021: Trench-Isolated (FBK 6” wafer)
8. Q2/2021: RSD2 (FBK 6” wafer)
9. Q2/2021: ExFlux0 -> optimized for extreme fluence
10. Q4/2021: UFSD4 (FBK 6” wafer, ATLAS, CMS Timing layer)
Future:
11. 2022: ExFlux1 -> optimized for extreme fluence
12. 2022: SEB-resistant -> optimized for extreme fluence
13. 2022: Trench- Isolated2 -> (AIDAInnova)
